Plasma-Device
PORTA
Device for activation, cleaning and coating with chamber volumes up to 720 liters.
Specifications
General:
Stand-alone device
Dimensions: 1650 × 2050 × 3200 mm (W × H × D)
Process chamber:
Material: stainless steel
Volume: 720 liters
Dimensions: 900 × 900 × 900 mm (W × H × D)
Volume: 720 liters
Dimensions: 900 × 900 × 900 mm (W × H × D)
Gas flow control:
Up to 7 automated mass flow controllers (MFC)
Energy input:
Radio frequency (RF):
Power up to 10 kW,
Frequency 13.56 MHz,
Automatic RF matching network,
water cooled electrode system
Power up to 10 kW,
Frequency 13.56 MHz,
Automatic RF matching network,
water cooled electrode system
Security elements:
Inductive door safety contacts,
Kill switch,
Applies to latest CE norm
Kill switch,
Applies to latest CE norm
Control:
SPS with display, fully automated plasma process
Connection:
Electrics: 400 V, (L1, L2, L3, N, P), 50 Hz
Compressed air: 400 V, (L1, L2, L3, N, P), 50 Hz
Process gas: 1 to 2.5 bar
Power consumption: max. 15 kW
Water: 2 to 3 bar, 6 to 11 l/min
Compressed air: 400 V, (L1, L2, L3, N, P), 50 Hz
Process gas: 1 to 2.5 bar
Power consumption: max. 15 kW
Water: 2 to 3 bar, 6 to 11 l/min
Weight:
Ca. 1000 kg, without vacuum pump
Vacuum pump:
System consisting of backing and main pump
Options
PC control:
Visualization software and process diagrams
Network:
Network access and remote control
Contact for PORTA
Made with ❤ by Digital Baden