Stand-alone device
Dimensions: 600 × 1900 × 800 mm (W × H × D)
Process chamber:
Material: stainless steel
Volume: 80 liters
Dimensions: 400 × 400 × 500 mm (W × H × D)
Can be operated in these configurations:
with 1, 2 or 3 tablets
with a rotary drum (volume 14 liters)
Gas flow control:
Up to 4 automated mass flow controllers (MFC)
Energy input:
2 alternatives:
Radio frequency (RF):
Power up to 1200 W,
Frequency 13.56 MHz,
Automatic RF matching network
Low Frequency (LF):
Power up to 1250 W,
Frequency 10 to 300 kHz
In the tablet setup every tablet is electrically independent.
Security elements:
Inductive door safety contacts,
Kill switch,
Applies to latest CE norm
Control:
SPS with display, fully automated plasma process
Connection:
Electrics: 400 V, 32 A, 50 Hz
Compressed air: 6 bar, free of water and oil
Process gas: 1 to 1,5 bar
Power consumption: max. 5.5 kW
Water: 2 to 3 bar, 3 to 7 l/min